17 citations · 28 across the 2 of their papers we have counts for
2 papers
cond-mat.mtrl-sci2011★ 11 cited
Periodic Variation of Stress in Sputter Deposited Si/WSi2 Multilayers
Kimberley MacArthur, Bing Shi, Ray Conley +1
A tension increment after sputter deposition of 1 nm of WSi2 onto sputtered Si was observed at low Ar gas pressures. Wafer curvature data on multilayers were found to have a period…
cond-mat.mtrl-sci2010★ 17 cited
Pressure-dependent transition from atoms to nanoparticles in magnetron sputtering: Effect on WSi2 film roughness and stress
Lan Zhou, Yiping Wang, Hua Zhou +6
We report on the transition between two regimes from several-atom clusters to much larger nanoparticles in Ar magnetron sputter deposition of WSi2, and the effect of nanoparticles…