Superconducting NbTiN Thin Films with Highly Uniform Properties over a 100 mm diameter Wafer

D. J. Thoen, B. G. C. Bos, E. A. F. Haalebos +3

Uniformity in thickness and electronic properties of superconducting niobium titanium nitride (NbTiN) thin films is a critical issue for upscaling superconducting electronics, such…