Ironsilicide formation by high temperature codeposition of Fe-2Si with different thicknesses on Si (111)

I. Dézsi, Cs. Fetzer, F. Tanczikó +4

Fe and 2Si were co-deposited on Si (111) surface at 853 K. The formation of silicides was investigated by Mossbauer spectroscopy and electron microscopy. Depending on the thickness…