most citedControlled oxygen vacancy induced p-type conductivity in HfO{2-x} thin films

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cond-mat.mtrl-sci2011★ 98 cited

Controlled oxygen vacancy induced p-type conductivity in HfO{2-x} thin films

Erwin Hildebrandt, Jose Kurian, Mathis M. Müller +3

We have synthesized highly oxygen deficient HfO thin films by controlled oxygen engineering using reactive molecular beam epitaxy. Above a threshold value of oxygen vacanci…