Conductivity of LaAlO/SrTiO3 Interfaces made by Sputter Deposition

I. M. Dildar, D. B. Boltje, M. H. S. Hesselberth +3

We have investigated the properties of interfaces between LaAlO3 films grown on SrTiO3 substrates singly terminated by TiO2. We used RF sputtering in a high-pressure oxygen atmosph…