173 citations · 272 across the 4 of their papers we have counts for
4 papers
Short Communication: Stable DRIE-patterned SiO2/Si3N4 electrets for electret-based vibration energy harvesters
S. Boisseau, A. B. Duret, G. Despesse +3
This paper is about a new manufacturing process aimed at developing stable SiO2/Si3N4 patterned electrets using a Deep Reactive Ion Etching (DRIE) step for an application in electr…
Optimization of an electret-based energy harvester
S. Boisseau, G. Despesse, A. Sylvestre
Thanks to miniaturisation, it is today possible to imagine self-powered systems that use vibrations to produce their own electrical energy. Many energy-harvesting systems already e…
Cantilever-based electret energy harvesters
S. Boisseau, G. Despesse, T. Ricart +2
Integration of structures and functions allowed reducing electric consumptions of sensors, actuators and electronic devices. Therefore, it is now possible to imagine low-consumptio…
Electret-based cantilever energy harvester: design and optimization
S. Boisseau, G. Despesse, A. Sylvestre
We report in this paper the design, the optimization and the fabrication of an electret-based cantilever energy harvester. We develop the mechanical and the electrostatic equations…