most citedDetermining sample alignment in X-ray Reflectometry using thickness and density from GaAs/AlAs multilayer certified reference materials

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cond-mat.mtrl-sci2013★ 2 cited

Determining sample alignment in X-ray Reflectometry using thickness and density from GaAs/AlAs multilayer certified reference materials

Donald Windover, David L. Gil, Yasushi Azuma +1

X-ray reflectometry (XRR) provides researchers and manufacturers with a non-destructive way to determine thickness, roughness, and density of thin films deposited on smooth substra…