most citedFabrication of high quality GaN nanopillar arrays by dry and wet chemical etching

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cond-mat.mtrl-sci2013★ 1 cited

Fabrication of high quality GaN nanopillar arrays by dry and wet chemical etching

Dipak Paramanik, Abhishek Motayed, Matthew King +4

We study strain relaxation and surface damage of GaN nanopillar arrays fabricated using inductively coupled plasma (ICP) etching and post etch wet chemical treatment. We controlled…