most citedStudy of depth profile of hydrogen in hydrogenated diamond like carbon thin film using ion beam analysis techniques

15 citations · 15 across the 1 of their papers we have counts for

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1 paper

cond-mat.mtrl-sci2013★ 15 cited

Study of depth profile of hydrogen in hydrogenated diamond like carbon thin film using ion beam analysis techniques

J Datta, H S Biswas, P Rao +5

The Hydrogenated Diamond Like Carbon (HDLC) thin films are deposited on Silicon substrate at room temperature using asymmetric capacitively coupled RF plasma with varying flow rate…