collaborators

1 paper

cond-mat.mes-hall2013

Metallic coatings of MEMS at low temperatures: stress, elasticity and non-linear dissipation

Eddy Collin, Johannes Kofler, Sabine Lakhloufi +3

We present mechanical measurements performed at low temperatures on cantilever-based microelectro-mechanicalstructures(MEMS) coated with a metallic layer. Two very different coatin…