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P. Pekko

1 paper hereh-index 10377 citations26 works total

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  • last author1

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  • cond-mat.mtrl-sci1

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most citedDetermination of Doping and Temperature Dependent Elastic Constants of Degenerately Doped Silicon from MEMS Resonators

77 citations · 77 across the 1 of their papers we have counts for

collaborators

1 paper

cond-mat.mtrl-sci2014★ 77 cited

Determination of Doping and Temperature Dependent Elastic Constants of Degenerately Doped Silicon from MEMS Resonators

Antti Jaakkola, Mika Prunnila, Tuomas Pensala +2

Elastic constants c11, c12 and c44 of degenerately doped silicon are studied experimentally as a function of the doping level and temperature. First and second order temperature co…

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