11 citations · 21 across the 3 of their papers we have counts for
3 papers
cond-mat.mtrl-sci2014
Temperature dependent characteristics of GaSb p-channel MOSFETs with Si-implanted source and drain
Lianfeng Zhao, Zhen Tan, Jing Wang +1
GaSb p-channel MOSFETs with an atomic layer deposited Al2O3 gate dielectric and a self-aligned Si implanted source/drain are demonstrated. Thermal anneal conditions are optimized f…
cond-mat.mtrl-sci2013★ 10 cited
Effects of ozone post deposition treatment on interfacial and electrical characteristics of atomic-layer-deposited Al2O3 and HfO2 films on GaSb substrates
Lianfeng Zhao, Zhen Tan, Jing Wang +1
Atomic-layer-deposited Al2O3 and HfO2 films on GaSb substrates were treated by in-situ ozone post deposition treatment (PDT). The effects of ozone PDT on the interfacial and electr…
cond-mat.mtrl-sci2013★ 11 cited
Improved Interfacial and Electrical Properties of GaSb Metal Oxide Semiconductor Devices Passivated with Acidic (NH4)2S Solution
Lianfeng Zhao, Zhen Tan, Jing Wang +1
Surface passivation with acidic (NH4)2S solution is shown to be effective in improving the interfacial and electrical properties of HfO2/GaSb metal oxide semiconductor devices. Com…