22 citations · 22 across the 1 of their papers we have counts for
2 papers
cond-mat.mtrl-sci2014★ 22 cited
Integrating Atomic Layer Deposition and Ultra-High Vacuum Physical Vapor Deposition for In Situ Fabrication of Tunnel Junctions
Alan J. Elliot, Gary A. Malek, Rongtao Lu +4
Atomic Layer Deposition (ALD) is a promising technique for growing ultrathin, pristine dielectrics on metal substrates, which is essential to many electronic devices. Tunnel juncti…
cond-mat.mtrl-sci2013
Probing the Nucleation of Al2O3 in Atomic Layer Deposition on Aluminum for Ultrathin Tunneling Barriers in Josephson Junctions
Alan J. Elliot, Gary Malek, Logan Wille +5
Ultrathin dielectric tunneling barriers are critical to Josephson junction (JJ) based superconducting quantum bits (qubits). However, the prevailing technique of thermally oxidizin…