Burst-mode fs-laser direct writing for full-thickness oxidation of Ta thin films

Lina Grineviciute, Hsin-Hui Huang, Haoran Mu +5

Direct fs-laser (1030~nm/200~fs) write of a throughout oxide Ta${}_2$O${}_5$ on a 200~nm Ta film was achieved using a combined ps- and ns- burst mode (Burst-in-Burst or BiB) of fs-…