most citedCharacterization of carbon contamination under ion and hot atom bombardment in a tin-plasma extreme ultraviolet light source

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cond-mat.mtrl-sci2014★ 236 cited

Characterization of carbon contamination under ion and hot atom bombardment in a tin-plasma extreme ultraviolet light source

A Dolgov, D Lopaev, C J Lee +4

Molecular contamination of a grazing incidence collector for extreme ultraviolet (EUV) lithography was experimentally studied. A carbon film was found to have grown under irradiati…