most citedTitanium oxynitride thin films with tunable double epsilon-near-zero behaviour

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cond-mat.mtrl-sci2017★ 116 cited

Titanium oxynitride thin films with tunable double epsilon-near-zero behaviour

Laurentiu Braic, Nikolaos Vasilantonakis, Andrei P. Mihai +10

Titanium Oxynitride (TiOxNy) thin films are fabricated using reactive magnetron sputtering. The mechanism of their growth formation is explained and their optical properties are pr…