Defect-controlled electrical and optical properties of CrN thin films: experiment and first-principles study

J. Bulíř, U. D. Wdowik, J. More-Chevalier +7

Thin chromium nitride (CrN) films were deposited by RF magnetron sputtering in a reactive atmosphere of Ar-N${}_2$ on fused silica and MgO (001) substrates at temperatures between 40…