2 citations · 2 across the 1 of their papers we have counts for
1 paper
Deepak Bhatia, Himanshu Sharma, R. S. Meena +1
This novel piezoelectric zinc oxide (ZnO) thin film microcantilever was fabricated by micromachining technique. To release the cantilever, wet anisotropic etching of Silicon (Si) w…