most citedRF plasma cleaning of optical surfaces: A study of cleaning rates on different carbon allotropes as a function of RF powers and distances

32 citations · 32 across the 1 of their papers we have counts for

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physics.ins-det2015★ 32 cited

RF plasma cleaning of optical surfaces: A study of cleaning rates on different carbon allotropes as a function of RF powers and distances

M. González Cuxart, J. Reyes-Herrera, I. Šics +4

An extended study on an advanced method for the cleaning of carbon contaminations on large optical surfaces using a remote inductively coupled low pressure RF plasma source (GV10x…