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20132015
most citedCharacterization of carbon contamination under ion and hot atom bombardment in a tin-plasma extreme ultraviolet light source

236 citations · 309 across the 4 of their papers we have counts for

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physics.plasm-ph2015★ 1 cited

Numerical and experimental studies of the carbon etching in EUV-induced plasma

D. I. Astakhov, W. J. Goedheer, C. J. Lee +6

We have used a combination of numerical modeling and experiments to study carbon etching in the presence of a hydrogen plasma. We model the evolution of a low density EUV-induced p…