most citedSingle G centers in silicon fabricated by co-implantation with carbon and proton

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1 paper

physics.app-ph2022★ 1 cited

Single G centers in silicon fabricated by co-implantation with carbon and proton

Yoann Baron, Alrik Durand, Tobias Herzig +11

We report the fabrication of G centers in silicon with an areal density compatible with single photon emission at optical telecommunication wavelengths. Our sample is made from a s…