most citedA semi-analytical approach for the characterization of ordered 3D nano structures using grazing-incidence X-ray fluorescence

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physics.comp-ph2019★ 12 cited

A semi-analytical approach for the characterization of ordered 3D nano structures using grazing-incidence X-ray fluorescence

K. V. Nikolaev, V. Soltwisch, P. Hoenicke +6

Following the recent demonstration of grazing-incidence X-ray fluorescence (GIXRF) based characterization of the 3D atomic distribution of different elements and dimensional parame…