50 citations · 50 across the 2 of their papers we have counts for
4 papers
Reduction of residual stress in AlN thin Films synthesized by magnetron sputtering technique
Padmalochan Panda, R. Ramaseshan, N Ravi +5
We report the reduction in residual stress of AlN thin films and also the crystal structure, surface morphology and nanomechanical properties of magnetron sputtered as a function o…
Preferentially orientated E-beam TiN thin films using focused jet of nitrogen gas
R. Ramaseshan, Feby Jose, S. Rajagopalan +1
A modified electron beam evaporator has been used judiciously to synthesize TiN thin films with (111) preferred orientation. This new design involved in creating local plasma by ac…
Temperature dependence of dielectric constants in Titanium Nitride
S. Tripura Sundari, R. Ramaseshan, Feby Jose +2
The temperature dependence of optical constants of titanium nitride thin film is investigated using spectroscopic ellipsometry between 1.4 to 5 eV in the temperature range 300 K to…
Optical properties and hardness of highly a-axis oriented AlN films
Feby Jose, R. Ramaseshan, S. Tripura Sundari +4
This paper reports optical and nanomechanical properties of seldom studied highly a-axis oriented AlN thin films for the first time. These films were deposited by reactive DC magne…