29 citations · 64 across the 3 of their papers we have counts for
3 papers
Alignment free characterization of 2D gratings
Morten Hannibal Madsen, Pierre Boher, Poul-Erik Hansen +1
Fast characterization of 2-dimensional gratings is demonstrated using a Fourier lens optical system and a differential optimization algorithm. It is shown that both the grating spe…
Imaging Scatterometry
Morten Hannibal Madsen, Poul-Erik Hansen
We present an optical metrology system for characterization of topography of micro/nano-structures on a surface or embedded in a semi-transparent material. Based on the principles…
Fast Characterization of Moving Samples with Nano-Textured Surfaces
Morten Hannibal Madsen, Poul-Erik Hansen, Maksim Zalkovskij +2
We characterize nano-textured surfaces by optical diffraction techniques using an adapted commercial light microscope with two detectors, a CCD camera and a spectrometer. The acqui…