collaborators

1 paper

cond-mat.mes-hall2015

Experimental Demonstration of Single Electron Transistors Featuring SiO2 PEALD in Ni-SiO2-Ni Tunnel Junctions

Golnaz Karbasian, Michael S. McConnell, Alexei O. Orlov +2

We report the use of plasma-enhanced atomic layer deposition (PEALD) to fabricate single-electron transistors (SETs) featuring ultra-thin (~1 nm) tunnel-transparent SiO2 in Ni-SiO2…