most citedIon-beam nanopatterning of silicon surfaces under co-deposition of non-silicide-forming impurities

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cond-mat.mes-hall2016★ 17 cited

Ion-beam nanopatterning of silicon surfaces under co-deposition of non-silicide-forming impurities

B. Moon, S. Yoo, J. -S. Kim +3

We report experiments on surface nanopatterning of Si targets which are irradiated with 2 keV Ar + ions impinging at near-glancing incidence, under concurrent co-deposition of Au i…