Kinetics studies on $\hat{I}º$ to ${\hat{I}}^2$-Ga${}_2$O${}_3$ phase transformations via in-situ high temperature X-ray diffraction

Jingyu Tang, Po-Sen Tseng, Kunyao Jiang +3

The kinetics of the $\hat{I}º$ to ${\hat{I}}^2$-Ga${}_2$O${}_3$ phase transformation were investigated in five batches of nominally phase-pure $\hat{I}º$-Ga2O3 thin films heteroepitaxially grown on c-plane…