most citedSuperconducting NbTiN Thin Films with Highly Uniform Properties over a 100 mm diameter Wafer

55 citations · 55 across the 1 of their papers we have counts for

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astro-ph.IM2016★ 55 cited

Superconducting NbTiN Thin Films with Highly Uniform Properties over a 100 mm diameter Wafer

D. J. Thoen, B. G. C. Bos, E. A. F. Haalebos +3

Uniformity in thickness and electronic properties of superconducting niobium titanium nitride (NbTiN) thin films is a critical issue for upscaling superconducting electronics, such…