most citedSuperconducting NbTiN Thin Films with Highly Uniform Properties over a 100 mm diameter Wafer

55 citations · 76 across the 2 of their papers we have counts for

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cond-mat.supr-con2016★ 21 cited

Reactive magnetron sputter deposition of superconducting niobium titanium nitride thin films with different target sizes

B. G. C. Bos, D. J. Thoen, E. A. F. Haalebos +4

The superconducting critical temperature (Tc > 15K) of niobium titanium nitride (NbTiN) thin films allows for low-loss circuits up to 1.1 THz, enabling on-chip spectroscopy and mul…