47 citations · 66 across the 3 of their papers we have counts for
3 papers
cond-mat.mtrl-sci2016★ 19 cited
A model for pressurized hydrogen induced thin film blisters
R. A. J. M. van den Bos, V. Reshetniak, C. J. Lee +2
We introduce a model for hydrogen induced blister formation in nanometer thick thin films. The model assumes that molecular hydrogen gets trapped under a circular blister cap causi…
cond-mat.mtrl-sci2014
Extreme ultraviolet radiation induced defects in single-layer graphene
A. Gao, E. Zoethout, J. M. Sturm +2
We study extreme ultraviolet (EUV) radiation induced defects in single-layer graphene. Two mechanisms for inducing defects in graphene were separately investigated: photon induced…
physics.plasm-ph2013★ 47 cited
Comparison of H2 and He carbon cleaning mechanisms in extreme ultraviolet induced and surface wave discharge plasmas
A Dolgov, D Lopaev, T Rachimova +6
Cleaning of contamination of optical surfaces by amorphous carbon (a-C) is highly relevant for extreme ultraviolet (EUV) lithography. We have studied the mechanisms for a-C removal…