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Study of ZrO2 Thin Films Deposited at Glancing Angle by Magnetron Sputtering under Varying Substrate Rotation
R. B. Tokas, S. Jena, J. S. Mishal +7
In the present work, a set of ZrO2 thin films have been deposited at 82 degree angle of deposition at several substrate rotation speeds and at 0 degree. The effect of substrate rot…
Characterization of Micro-Roughness Parameters and Optical Properties of Obliquely Deposited HfO2 Thin Films
R B Tokas, S Jena, P Sarkar +2
Oblique angle deposited oxide thin films have opened up new dimensions in fabricating optical interference devices with tailored refractive index profile along thickness by tuning…
Oblique Angle Deposition of HfO2 Thin Films: Investigation of Elastic and Micro Structural Properties
R B Tokas, S Jena, P Sarkar +4
Oblique angle deposition of oxides is being famous for fabricating inhomogeneous thin films with variation of refractive index along thickness in a functional form. Inhomogeneous l…
Structure related optical properties of electron beam evaporated ZrO2:10%SiO2 thin films
S. Jena, R. B. Tokas, S. Thakur +1
ZrO2:10%SiO2 thinfilms have been deposited on fused silica substrate by reactive electron beam co-evaporation technique at different oxygen partial pressure. The structural analysi…