2 citations · 2 across the 2 of their papers we have counts for
2 papers
cond-mat.mtrl-sci2016
Study of ZrO2 Thin Films Deposited at Glancing Angle by Magnetron Sputtering under Varying Substrate Rotation
R. B. Tokas, S. Jena, J. S. Mishal +7
In the present work, a set of ZrO2 thin films have been deposited at 82 degree angle of deposition at several substrate rotation speeds and at 0 degree. The effect of substrate rot…
cond-mat.mtrl-sci2014★ 2 cited
Oblique Angle Deposition of HfO2 Thin Films: Investigation of Elastic and Micro Structural Properties
R B Tokas, S Jena, P Sarkar +4
Oblique angle deposition of oxides is being famous for fabricating inhomogeneous thin films with variation of refractive index along thickness in a functional form. Inhomogeneous l…