Growth of AlGaN under the conditions of significant gallium evaporation: phase separation and enhanced lateral growth

I. O. Mayboroda, A. A. Knizhnik, Yu. V. Grishchenko +5

Growth kinetics of AlGaN in NH3 MBE under significant Ga desorption was studied. It was found that the addition of gallium stimulates 2D growth and provides better morphology of fi…