most citedAnisotropic Etching of Graphite and Graphene in a Remote Hydrogen Plasma

32 citations · 32 across the 1 of their papers we have counts for

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cond-mat.mes-hall2017★ 32 cited

Anisotropic Etching of Graphite and Graphene in a Remote Hydrogen Plasma

Dorothee Hug, Simon Zihlmann, Mirko K. Rehmann +6

We investigate the etching of a pure hydrogen plasma on graphite samples and graphene flakes on SiO and hexagonal Boron-Nitride (hBN) substrates. The pressure and distance depe…