61 citations · 82 across the 2 of their papers we have counts for
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physics.plasm-ph2017★ 61 cited
QDB: a new database of plasma chemistries and reactions
Jonathan Tennyson, Sara Rahimi, Christian Hill +31
One of the most challenging and recurring problems when modelling plasmas is the lack of data on key atomic and molecular reactions that drive plasma processes. Even when there are…
physics.plasm-ph2015★ 21 cited
Structure of Velocity Distribution of Sheath-Accelerated Secondary Electrons in Asymmetric RF-DC Discharge
Alexander V. Khrabrov, Igor D. Kaganovich, Peter L. G. Ventzek +2
The ballistic population is thought to be responsible for alleviating the electron shading effect and the notching of the photoresist layer. We have performed test-particle simulat…