most citedInfluence of magnetic field on plasma parameters and thin film deposition along axial and radial distances in DC magnetron

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physics.plasm-ph2017★ 3 cited

Influence of magnetic field on plasma parameters and thin film deposition along axial and radial distances in DC magnetron

S. Gopikishan, I. Banerjee, S. K. Mahapatra

Magnetic field (B) distribution of the magnetron was measured and discussed its effect on plasma parameters and deposition rate. Plasma parameters such as electron temperature (Te)…