Characterization of Carbon-Contaminated B4C-Coated Optics after Chemically Selective Cleaning with Low-Pressure RF Plasma

H. Moreno Fernández, D. Rogler, G. Sauthier +4

Boron carbide (B4C) is one of the few materials that is expected to be mostly resilient with respect to the extremely high brilliance of the photon beam generated by free electron…