Microwave Irradiation Assisted Deposition of Ga2O3 on III-nitrides for deep-UV opto-electronics

Piyush Jaiswal, Usman Ul Muazzam, Anamika Singh Pratiyush +5

We report on the deposition of gallium oxide using microwave irradiation technique on III nitride epi layers. We also report on the first demonstration of a gallium oxide device, a…