most citedDirect atomic fabrication and dopant positioning in Si using electron beams with active real time image-based feedback

60 citations · 60 across the 1 of their papers we have counts for

collaborators

1 paper

cond-mat.mtrl-sci2017★ 60 cited

Direct atomic fabrication and dopant positioning in Si using electron beams with active real time image-based feedback

Stephen Jesse, Bethany M. Hudak, Eva Zarkadoula +9

Semiconductor fabrication is a mainstay of modern civilization, enabling the myriad applications and technologies that underpin everyday life. However, while sub-10 nanometer devic…