most citedAb Initio Study of the Early Stage of Si Epitaxy on the Chlorinated Si(100) Surface

9 citations · 9 across the 1 of their papers we have counts for

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1 paper

physics.app-ph2017★ 9 cited

Ab Initio Study of the Early Stage of Si Epitaxy on the Chlorinated Si(100) Surface

T. V. Pavlova, E. S. Skorokhodov, G. M. Zhidomirov +1

The homoepitaxial growth of Si on Si(100) covered by a resist mask is a necessary technological step for the fabrication of donor-based quantum devices with scanning tunneling micr…