422 citations · 1.2k across the 8 of their papers we have counts for
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cond-mat.mes-hall2016★ 4 cited
Optical probing of mechanical loss of a Si_{3}N_{4} membrane below 100 mK
R. Fischer, N. S. Kampel, G. G. T. Assumpção +5
We report on low mechanical loss in a high-stress silicon nitride (Si_{3}N_{4}) membrane at temperatures below 100 mK. We isolate a membrane via a phononic shield formed within a s…
cond-mat.mes-hall2013★ 90 cited
A phononic bandgap shield for high-Q membrane microresonators
P. -L. Yu, K. Cicak, N. S. Kampel +4
A phononic crystal can control the acoustic coupling between a resonator and its support structure. We micromachine a phononic bandgap shield for high Q silicon nitride membranes a…