most citedAmplitude- and gas pressure-dependent nonlinear damping of high-Q oscillatory MEMS micro mirrors

37 citations · 37 across the 1 of their papers we have counts for

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cond-mat.mes-hall2018★ 37 cited

Amplitude- and gas pressure-dependent nonlinear damping of high-Q oscillatory MEMS micro mirrors

Ulrike Nabholz, Wolfgang Heinzelmann, Jan E. Mehner +1

Silicon-based micro-electromechanical systems (MEMS) can be fabricated using bulk and surface micromachining technology. A micro mirror designed as an oscillatory MEMS constitutes…