Quardratic Electromechanical Strain in Silicon Investigated by Scanning Probe Microscopy

Junxi Yu, Ehsan Nasr Esfahani, Qingfeng Zhu +4

Piezoresponse force microscopy (PFM) is a powerful tool widely used to characterize piezoelectricity and ferroelectricity at the nanoscale. However, it is necessary to distinguish…