MEMS Microphones as Ultrasonic Transducers: Nonlinear Electrostatic Actuation and a Parametric Array Prototype

Xiaoyu Niu, Zihuan Liu, Ehsan Vatankhah +2

This paper investigates commercial-style capacitive MEMS microphone dies as air-coupled ultrasonic transmitters under nonlinear pull-in and snap-back actuation and demonstrates a c…