Elastocapillary folding using stop-programmable hinges fabricated by 3D micro-machining

A. Legrain, J. W. Berenschot, N. R. Tas +1

We show elasto-capillary folding of silicon nitride objects with accurate folding angles between flaps of 70.6$\pm$0.1° and demonstrate the feasibility of such accurate micro-assem…