Negative Capacitance Enables FinFET Scaling Beyond 3nm Node

Ming-Yen Kao, Harshit Agarwal, Yu-Hung Liao +6

A comprehensive study of the scaling of negative capacitance FinFET (NC-FinFET) is conducted with TCAD. We show that the NC-FinFET can be scaled to "2.1nm node" and almost "1.5nm n…