Energy Bands and Breakdown Characteristics in Al2O3/UWBG AlGaN Heterostructures

Seungheon Shin, Kyle Liddy, Yinxuan Zhu +5

We report on energy bands and breakdown characteristics of Al2O3 dielectrics on ultra-wide bandgap (UWBG) AlGaN heterostructures. Metal-dielectric-semiconductor structures are impo…