most citedSelf-bias voltage formation and charged particle dynamics in multi-frequency capacitively coupled plasmas

15 citations · 15 across the 1 of their papers we have counts for

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physics.plasm-ph2021★ 15 cited

Self-bias voltage formation and charged particle dynamics in multi-frequency capacitively coupled plasmas

R. U. Masheyeva, K. N. Dzhumagulova, M. Myrzaly +2

In this work, we analyze the creation of the discharge asymmetry and the concomitant formation of the DC self-bias voltage in capacitively coupled radio frequency plasmas driven by…