most citedA route to engineered high aspect-ratio silicon nanostructures through regenerative secondary mask lithography

11 citations · 11 across the 1 of their papers we have counts for

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1 paper

physics.chem-ph2021★ 11 cited

A route to engineered high aspect-ratio silicon nanostructures through regenerative secondary mask lithography

Martyna Michalska, Sophia K. Laney, Tao Li +3

Silicon nanostructuring imparts unique material properties including antireflectivity, antifogging, anti-icing, self-cleaning, and/or antimicrobial activity. To tune these properti…