Sensitive label-free IgG detection using MEMS QCM biosensor with 125-MHz wireless quartz resonator

Lianjie Zhou, Fumihito Kato, Hirotsugu Ogi

We present a wireless QCM biosensor fabricated using MEMS technology. The MEMS QCM biosensor contains a 125-MHz AT-cut quartz resonator embedded in the microchannel. Because of the…